| Original language | English (US) |
|---|---|
| Patent number | US 7,141,496 |
| State | Published - 2006 |
Method of treating microelectronic substrates
James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor), D Taylor (Inventor), Mark Wagner (Inventor), D Brainard (Inventor)
Research output: Patent